Ian Hu
Ph.D. National Cheng Kung University 2011
Dissertation:
Synergetic Effects of Multi-Zone Wafer-Back Pressure and Retaining-Ring Parameters on Contact Stress Uniformity in Chemical Mechanical Planarization and a Model Problem of Grooved Surface Lubrication
Mathematics Subject Classification: 76—Fluid mechanics
Advisor 1: Tian-Shiang Yang
Advisor 2: Kuo-Shen Chen
No students known.
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